New semiconductor chiller combines deep cooling with refrigerant that has no global warming potential
A large-capacity industrial chiller capable of providing cooling at temperatures of −120°C or below has been developed to remove heat generated during semiconductor manufacturing processes. Using nitrogen as a refrigerant with a global warming potential (GWP) of zero, the system combines environmental benefits with large-capacity cooling performance. The technology has advanced to a level suitable for commercialization and practical use in industrial settings.